CMC Materials was acquired by Entegris on July 6, 2022, and is no longer an independent publicly traded company. Its chemical mechanical planarization (CMP) slurries and polishing pads were integrated into Entegris, and the CMC brand transitioned to the Entegris name.
This article explains CMC Materials’ current position, which businesses remained with Entegris, which business was sold, how CMP materials are used, and Entegris’ latest results as of July 2026.
CMC Materials Today
| Former company | CMC Materials, Inc., formerly Cabot Microelectronics |
|---|---|
| Current status | Materials and CMP products within Entegris |
| Acquisition completed | July 6, 2022 |
| Former headquarters | Aurora, Illinois, United States |
| Former ticker | Nasdaq: CCMP (delisted) |
| Current public company | Entegris (Nasdaq: ENTG) |
| Continuing products | CMP slurries, CMP pads, post-CMP cleaning and surface-preparation materials |
| Key markets | Logic, memory, foundry, silicon and SiC wafer manufacturing |
After the acquisition, Entegris planned to move CMC-branded products, labels and documents to the Entegris brand by August 2023. The company said the visual brand change would not affect product quality, performance or reliability.
Sources: Entegris completes the CMC Materials acquisition and brand transition notice
Why Entegris Acquired CMC Materials
Entegris was strong in high-purity materials, filtration, fluid handling and contamination control, while CMC Materials was a major supplier of CMP slurries and pads. The combination allows Entegris to address the entire CMP flow with polishing materials, filters, cleaners, brushes, monitoring equipment and packaging.
- Broader CMP portfolio: CMC added major slurry and pad product lines.
- Integrated process solutions: Materials, filtration, cleaning and monitoring can be engineered together.
- Advanced-node support: More layers and tighter defect limits increase the importance of planarization.
- New substrate materials: The portfolio includes polishing products for SiC and other hard materials.
What Is CMP?
Chemical mechanical planarization combines chemical reactions with the mechanical action of abrasives and a polishing pad to flatten a wafer surface. Modern chips build many layers of conductors and dielectrics. Without planarization, surface topography would reduce the accuracy of later lithography and deposition steps.
| Product | Role |
|---|---|
| CMP slurry | Abrasive particles and chemicals selectively remove metals, dielectrics or substrate material |
| CMP pad | Applies controlled pressure and friction to achieve uniform flatness |
| Filtration | Removes agglomerates and contaminants that can cause scratches |
| Post-CMP cleaning | Removes particles, residues and metallic contamination after polishing |
| Process monitoring | Measures particle size, concentration and flow to reduce variability |
Advanced logic, taller 3D NAND stacks and more complex interconnects increase both the number of CMP steps and the required precision. Yield depends on controlling defects across slurries, pads, filtration, cleaning and monitoring.
Source: Entegris CMP solutions
Former CMC Product Lines That Continue Today
CMP Slurries
Entegris offers application-specific slurries for tungsten, copper, aluminum, barrier layers, dielectrics and silicon. The portfolio also includes surface-finishing slurries for hard substrates such as SiC, sapphire, GaN and diamond.
CMP Pads
NexPlanar, Medea and Epic pads use different hardness, porosity, compressibility and groove designs to fit specific processes. The portfolio serves 200 mm and 300 mm logic and memory production as well as SiC substrate polishing.
Post-CMP Cleaning and Contamination Control
Abrasive particles and chemistry residues must be removed after polishing. Entegris combines cleaning formulations, brushes, filters and ultraclean packaging with the former CMC polishing materials. This process-level integration was an important rationale for the acquisition.
The Electronic Chemicals Business Was Sold to Fujifilm
Not every former CMC business remained with Entegris. On October 2, 2023, Entegris completed the sale of the Electronic Chemicals business acquired with CMC Materials to Fujifilm for $700 million in cash. Entegris said the proceeds would be used to pay down debt.
Researching the former CMC portfolio therefore requires separating CMP slurries and pads retained by Entegris from the Electronic Chemicals operation transferred to Fujifilm.
Source: Entegris completes sale of Electronic Chemicals business
Latest Entegris Results
CMC Materials no longer reports standalone revenue or a share price. Entegris’ consolidated financial results show the current scale of the business.
| Period | Net sales | Key point |
|---|---|---|
| Entegris fiscal 2025 | $3.1966 billion | Down 1.4% year over year |
| First quarter 2026 | $811.9 million | Up 5% year over year |
| Q1 Materials Solutions | $351.1 million | Up from $341.4 million |
| Q1 GAAP operating margin | 17.4% | Up from 15.8% |
Entegris said first-quarter growth was primarily driven by increasing unit volumes related to the industry’s most advanced manufacturing processes. Investors should also watch semiconductor capital spending, customer inventories, export controls and the debt associated with acquisitions.
Sources: Entegris fiscal 2025 results and Entegris first-quarter 2026 results
Strengths and Risks
| Strengths | Risks and limitations |
|---|---|
| Broad portfolio of CMP slurries and pads | CMC performance is no longer reported separately |
| Process-wide filtration, cleaning and monitoring | Exposure to semiconductor fab utilization and capital spending |
| Products for advanced logic, memory and SiC | Long customer qualifications and customer concentration |
| Recurring demand for consumable materials | Raw-material, environmental, export-control and debt risks |
Summary
- Entegris acquired CMC Materials in July 2022.
- Nasdaq: CCMP was delisted; the current public company trades as Nasdaq: ENTG.
- CMP slurries, pads, cleaning and contamination-control products continue within Entegris.
- The former CMC Electronic Chemicals business was sold to Fujifilm for $700 million in 2023.
- Entegris generated $811.9 million in first-quarter 2026 net sales, up 5% year over year.
The CMC Materials corporate name has disappeared, but its CMP slurry and pad technology remains central to Entegris’ advanced semiconductor materials portfolio.
This article is based on public information available on July 14, 2026. It is not investment advice.

